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Desktop Lab Halogen Light Rapid Annealing Tube Heated Compact RTP Rapid Annealing Furnace , Vacuum RTP High Temperature Tube Furnace

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Desktop Lab Halogen Light Rapid Annealing Tube Heated Compact RTP Rapid Annealing Furnace , Vacuum RTP High Temperature Tube Furnace
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Caratteristiche
Specificazioni
Condition: New
Type: Resistance Furnace
Usage: Heat Treatment Furnace
Voltage: 208-240V 50/60HZ
Dimension(L*W*H): 340mm*260mm*380mm
Warranty: 1 Year
Applicable Industries: Energy & Mining, labs
After-sales Service Provided: Field installation, commissioning and training, Field maintenance and repair service, Video technical support, Online support, Overseas service center available
Power: 9KW
Weight: 65kg
Certificazione: CE&ISO9001: 2008
Classification:: Compact RTP fast annealing furnace
Application:: Laboratory fast annealing
Max Temperature: 1200℃
Working Temperature: 1000℃
Heating elements: Halogen light tube
Fastest heating rate: 50.C/Second
Fastest cooling rate: 60C/Minute
Max Vacuum: 10 Torr
Constant temperature zone: OD102*L305mm
Informazioni di base
Certificazione: CE&ISO9001: 2008
Termini di pagamento e spedizione
Packaging Details: Polybag inside, Polyfoam Filled and Wooden Carton outside
Supply Ability: 500 Piece/Pieces per Month
Descrizione di prodotto

Desktop halogen light tube heated compact RTP fast annealing furnace

Brief Introduction:

XY-1100RTP compact RTP fast annealing furnaceco is a compact rapid heating treatment tube furnace with 4" quartz tube and vacuum flange, It is special designed for annealing semiconductor or solar cell wafer.

XY-1100RTP compact RTP fast annealing furnace is heated by 8 Pieces of 10 KW halogen light tube around the chamber. The heating rate can upto max. 50C/second. 51 segments precision temperature controller is built with accuracy +/-1° C.  you can control the furnace and monitoring the temperature curve by RS485 plug port and control software .

 

Mian Characters:

 1: The heating rate can upto max. 50C/second

 2: 51 segments precision temperature controller.

 3: Can control the furnace and monitor the temperature curve by computer.

 4: Max Vacuum can up to 10 Torr. 

 

Technical Parameter
 

 

Application1.It has been widely used for materials or chemical lab to sinter various kind of new materials samples.
2. It is designed for annealing semiconductor wafers or solar cells with diameters up to 3".
Features*  XY-1200RTP is a compact rapid thermal processing tube furnace with a 4" I.D. processing quartz tube and vacuum flanges.
*  XY-1200RTP is heated by 8 units of 1KW halogen light with a max. heating rate of 50ºC/second. 
* 30~51 segment precision temperature controller with +/-1ºC accuracy is built into the furnace to allow for heating, dwelling, and cooling at various steps.
Structure1.Double layer steel casing with air cooling keeps furnace surface temperature lower than 60°C. 
2.High purity fibrous alumina insulation for maximum energy saving.
VoltageSingle Phase, 220V AC, 50/60Hz
PowerMax. 9KW(60A Breaker required)
Working Temperature1100ºC Max. for < 10 minutes
800ºC Max.   for < 120 minutes
600ºC Max.   for Continuous
Max.Heating Rate50°C/sec
Max. Cooling Rate60ºC/min (Under vacuum: 200 mtorr), 117ºC/min (under atmospheric pressure)
Heating Elements1.8 pcs 10Kw infrared light tube, ( Dia. =10mm, L=300mm, Heated Length =200mm)
2.Standard working life : 2000 hrs. ( depends on heating rate )
Heating Zone12" length with 4" constant temperature zone within +/-5ºC uniformity
ThermocoupleK type, the head of the thermocouple touches the Aluminum Nitride sample holder from underneath

Temperature

Controller

1.PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
2.30 programmable segments for precise control of heating rate, cooling rate and dwell time.
3.Built in PID Auto-Tune function with overheating & broken thermocouple broken protection.
4.Over temperature protection and alarm allows for operation without attendant(s).
5.+/- 1 ºC temperature accuracy.
6.RS485 Communications Port.
Quart Tube & Sample 
Holder		Quart Tube Size: 4.33" O.D x 4.05" I.D x 16.2" Length.
One 3" diameter AlN sample holder for annealing samples up to 3" dia. AlN has very high thermal conductivity which provides the best temperature uniformity in the sample area.
The sample holder is removable from the flange for using the RTP furnace with other purposes.
Vacuum Flange

1.KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves and water cooling jacket.
2.Only requires water cooling in long running times at temperatures > 600oC.
3.Circulating water rate: 0.5 m3 /hr.
4.Slide-out flange provides an easier way of loading, unloading the samples and other specific process needed.
5.Insert-able thermal-couple for accurate measurement.

Water Cooling

Jacket

*Cooling water is required.
*Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.
Flow-meterOne flow meter is installed on the front panel for adjusting gas flow from 16 - 160 ml/min
Vacuum GaugeDigital vacuum gauge with a measurement range from 10-4 to 1000 Torr is installed on the furnace.
Vacuum Pressure &
Gas Fitting		1.Pressure can reach 50 mtorr by using mechanical vacuum pump with KF25 adapter
2.Pressure can reach 10-4 torr by molecular pump with KF25 adapter
Dimension1200mm(L) X 330mm(W) X 530mm(H)
Net Weight90kg(150Ibs)
Application NotesTube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure).

 

 Photos of  Desktop halogen light tube heated compact RTP fast annealing furnace

Packaging & Shipping

Packaging;

Inside: Wraped by plastic paper.

Middle: Filled by ployfoam.

Outside: Packed by wooden carton. 

Shipping:

By Sea, by Air or by Couriers (DHL, UPS, TNT, Fedex  etc.)

 

.

Our Services

 

Company Information

Nanyang Xinyu Furnace Co., Ltd is one professional supplier of high temperature furnace, like lab muffle furnace, atmosphere furnace, Crucible furnace, laboratory tube furnace, dental furnace, vacuum furnace, vertical bell style furnace,CVD tube furnace, multiple heating zone (2/3/5 heating zone) tube furnace, rotary tilting tube furnace, RTP tube furnace and car bottom furnace etc. We have rich experience in the various thermal applications fields, especially on the high temperature lab furnace and heating elements researthing and developping working, which earn us a sound reputation among our product users and clients.

 

Company Products

 

 

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